One-Step Preparation of Si-Doped Ultra-Long β-Ga2O3 Nanowires by Low-Pressure Chemical Vapor Deposition
نویسندگان
چکیده
In this work, we prepared ultra-long Si-doped β-Ga2O3 nanowires on annealed Al2O3-film/Si substrate by low-pressure chemical vapor deposition (LPCVD) assisted Au as catalyst. The length of exceeds 300 μm and diameters range from ~30 to ~100 nm in one-dimensional structures. show good crystal quality exhibit (201) orientation, confirmed transmission electron microscopy X-ray diffraction analysis. PL spectrum obtained these has three obvious blue luminescence peaks at 398 (3.12 eV), 440 (2.82 492 (2.51 eV). electrical properties conductivity. A metal-semiconductor-metal device is made using Ti/Au the electrode, current reaches 200 pA a bias voltage 3 V. Our results that can be grown directly surface substrates. These have very high length-diameter ratio properties. possible mechanism for Si doping also presented.
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ژورنال
عنوان ژورنال: Crystals
سال: 2023
ISSN: ['2073-4352']
DOI: https://doi.org/10.3390/cryst13060898